Ultra high vacuum series products

Ultra high vacuum series products

The core of the company is to design and manufacture ultra-high vacuum chambers and systems, and has become a high-quality supplier of ultra-high vacuum products worldwide! From particle acceleration line components to ultra-high vacuum linear transmission equipment, XYZ operation platform, and vacuum system, JUV Company's rich experience and precise design and processing capabilities have been accumulated and embodied. Whether it's customized products or standardized modular products, JUV always puts understanding the needs of customers and responding to their demanding requirements first!
At present, the company's users have spread to research institutions and enterprise laboratories in many countries in North America, Europe, and Asia. From the concepts proposed by customers to the design and processing, the company has always been leading the development direction of cutting-edge ultra-high vacuum systems, components, and equipment!
The ultra-high vacuum chamber produced by the company has excellent performance. In the manufacturing process of the cavity, the company's engineers attach great importance to eliminating any possible air leakage, and the vacuum degree of the cavity can be better than 10-11 Torr. Each port is carefully calibrated to ensure accurate loading of various accessories. During cutting, special attention should be paid to avoiding contamination of the cavity by various materials; After completing the cutting, all parts will be carefully cleaned and welded in the ultra clean room; After confirming the port position again, the ultra-high vacuum chamber will undergo subsequent cleaning and packaging.

Equipment model
vacuum system
From concept proposal to design, processing, and installation, Johnsen Ultravac's professional technicians can design and manufacture systems that meet the specific requirements of users for any application. Years of accumulated experience have enabled Johnsen Ultravac to manufacture complex chambers, rapid injection chambers, sample transfer devices, rotary tables, lifting/swinging mechanical devices, and automatic electronic controlled water/gas distribution systems for users.
During the manufacturing process, Johnsen Ultravac always uses high-purity materials and strict quality control, resulting in a vacuum degree of better than 10-11 torr in the system. These systems include:
♦ Hybrid Plasma Spray System
♦ E-Beam Evaporation System
♦ Electron Cyclotron Resonance/Inductively Coupled Plasma System (ECR/ICP System)
♦ Laser Deposition System
♦ Sputtering System
♦ MBE Vacuum System
1. Hybrid Plasma Spray System
The system consists of a stainless steel bracket and a stainless steel double-layer water-cooled chamber, equipped with: Plasma Torch, RF Power Generator, supporting wiring, substrate control console, pump, ion gauge, process control system, etc.
RF/DC-ICP Torch is installed in the cavity. Plasma is generated through a mixture of gases and ignited by an arc.
The sedimentation source is generally powder or liquid, which is introduced into the wall through plasma spraying. When using liquids, nanostructured coatings or sedimentary layers are formed with significant changes in composition.
The operation of the substrate is carried out using a 6-axis sample stage, and the sample can rotate at high speed, with a heating temperature of up to 600 ℃.
The mixed gas is provided by a gas distribution system, which can simultaneously mix four gases and is equipped with a flow rate control unit, MFC power supply, LCD display, gas purification valve, and various stainless steel gas circuit interfaces.
The entire chamber is composed of a dry pump and a rotary booster pump, and is equipped with a water-cooled front-end absorption device, air filter, throttle valve, etc. The vacuum degree is measured by a capacitive pressure gauge and a Pirani/pressure sensor.
The PLC/PC vacuum process automatic control system loaded in the computer can monitor the pumping and plasma deposition processes, with simple operation. During the growth process, process protection locks can ensure that users will not encounter unexpected situations during use.
The system is designed and produced using a modular concept, which can fully meet the upgrading needs of users in the future.

2. E-Beam Evaporation System
The system adopts a 2-true cavity design, one click operation, and is equipped with multiple electron beam evaporation sources. The carousel with a substrate is located in the rapid injection chamber above the main cavity, separated from the main cavity by a valve. After vacuuming the rapid injection chamber, open the valve to align the substrate with the electron beam evaporation source. After the evaporation plating is completed, close the valve and release the gas from the rapid injection chamber to remove the sample, while maintaining a good vacuum in the main vacuum chamber.
Features:
♦ Automatic suction and deflation;
♦ System status LCD display panel;
♦ It only takes 30 minutes to enter ultra-high vacuum from the atmosphere;
♦ A variety of motor driven carousels;
♦ The uniformity of the sample with a diameter of 3 inches is better than ± 0.25%;
♦ The equipment has a compact structure, convenient operation, and simple maintenance.