ew generation high-precision temperature cesium ion source FIB system
Using the Nobel Prize winning laser cooling technology, zeroK Nanotech launched a new generation of high-performance focused ion beam system based on a temperature cesium ion source (Cs+LoTIS) in 2020- FIB: ZERO (Cs+LoTIS) and corresponding ion source upgrade accessories - FIB: RETRO. The ultra-low temperature technology adopted by zeroK Nanotech can reduce random motion in ion beams, resulting in ion beam spots in FIB: ZERO having higher brightness, smaller size, and lower energy loss compared to those generated by traditional ion sources. At the same time, it can also generate more secondary ions, achieving clearer imaging.
A series of tests have shown that the new generation FIB: ZERO (Cs+LoTIS) has higher micro/nano processing accuracy, clearer imaging contrast, and depth of field compared to traditional liquid metal gallium ion sources (Ga+LMIS) FIB systems. Its processing speed is basically consistent with traditional FIB, and it has better performance under low ion beam energy conditions. Compared with helium (He+) and neon (Ne+) ion sources FIB, FIB: ZERO has a processing speed of one order of magnitude higher and less processing damage to the sample.
application area
Nano level precision processing
Chip circuit modification and failure analysis
Preparation of micro nano electromechanical devices
◎ Material micro damage grinding processing
Micro damage transmission electron microscopy sample preparation
Equipment characteristics
Higher brightness: Temperature Cs+ions enable FIB: ZERO (Cs+LoTIS) to have higher brightness compared to traditional FIB (Ga+LMIS). Coupled with its new high contrast and deep field imaging system, the observation range of the sample is larger and clearer.
Smaller ion beam spot size: The FIB: ZERO (Cs+LoTIS) system has a small resolution of up to 2 nm, providing higher processing accuracy than traditional FIB (Ga+LMIS).
Smaller energy loss: up to 10 nA ion beam current, ensuring excellent performance under low energy ion beam conditions.
