In situ AFM detection system for scanning electron microscopy

In situ AFM detection system for scanning electron microscopy

AFSEM ™— Integrating AFM and SEM into one
AFSEM is a compact AFM (Atomic Force Microscopy) module suitable for vacuum environments, which can easily combine two powerful analytical techniques - AFM and SEM - to expand the sample imaging and analysis capabilities of SEM scanning electron microscopy. The combination of AFSEM technology and SEM technology makes it possible for people to explore and discover new things in the micro and nano worlds.
SEM combined with AFM solution:
*AFM in situ analysis using scanning electron microscopy
*Nanoprobes using SCL's self sensing cantilever technology
*No laser or detector required, suitable for any sample surface
*Compatible with most SEM without hindering normal operation
*Collaborative parallel analysis of AFM and SEM
In situ AFM analysis in scanning electron microscopy
AFSEM technology achieves functional complementarity between AFM and SEM, allowing SEM to simultaneously achieve high-resolution imaging of samples, realistic three-dimensional morphology, accurate height, distance measurement, and even material conductivity. To achieve this, simply move the position of the AFSEM cantilever probe (click to view details) to the sample position to be observed under SEM for detection. The optimized AFSEM workflow (with almost no reduction in SEM scanning time) ensures high efficiency. The powerful control software provided allows for optimization and intuitive measurement, system processing, and data analysis.
AFSEM is compatible with most SEM
GETec's AFSEM is suitable for most SEM or dual beam (SEM/FIB) systems. It can be directly installed on the door of the system chamber, while keeping the sample stage unchanged. In addition, AFSEM uses a self sensing cantilever probe without the need for lasers and sensors. In AFSEM, the cantilever beam holding the probe in an electric mirror only requires a 4.5mm space between the electrode shoe and the sample. Therefore, AFSEM can be compatible with various standard SEM, and GETec can handle the installation of any compatible SEM system vacuum chamber. It is precisely this elegant and compact design that enables scanning electron microscopy to achieve sub nanometer level morphology detection in conjunction with AFM technology.
Examples of successful AFSEM integration (see Integrated SEM List. pdf)
SEM-AFM Collaborative Analysis
For product or material analysis, it is usually necessary to use multiple techniques to analyze a sample or the same device and find correlations between parameters. If the sample needs to use both SEM and AFM imaging techniques, it means that we need to find the area of interest and locate it, and then take it to another device to find this area of interest in order to achieve analysis of the same area. What could be simpler than simply putting AFM inside SEM?
Close cooperation between AFSEM and SEM analysis technology
Due to its compact design, AFSEM maintains the integrity of SEM functions and can be used in conjunction with other standard scanning electron microscopy analysis techniques, such as conventional FIB, FEBID, and EDX, as well as stretchers, stress tests, robotic arms, etc. that can be paired with SEM