Time resolved fine cathode fluorescence analysis system

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Time resolved fine cathode fluorescence analysis system

The company focuses on the research and manufacturing of high-precision quantitative cathode fluorescence solutions. Its representative product, Attolight Allalin, is a cathode fluorescence analysis system with spatial resolution reaching the nanometer level. It is based on a groundbreaking technology - quantitative cathode fluorescence analysis technology, integrating optical microscopy modules and scanning electron microscopy into a complete system. In the Allalin system, there is no need to compromise between the large field of view, fast scanning SEM imaging technology, and hyperspectral and panchromatic CL imaging technology, which can be performed simultaneously. Attolight Chronos is an upgraded version of the Attolight Allalin quantitative cathode fluorescence analysis system, which can achieve temperature dependent, time resolved, and nanoscale resolution cathode fluorescence analysis. In time-resolved mode, the electron gun is driven by an ultrafast laser, generating ultra short electron pulses that excite precise synchronization between the laser and detector, making picosecond level time-resolved cathode fluorescence analysis possible.

Application field • Optical properties of semiconductor nanostructures

Detection and localization of crystal defects (dislocations, stacking faults, inclusions)

• Determination of nanoscale components

Quantitative analysis of doping

• Failure analysis

• Nanophotonics

Determination of localized radiative and non radiative carrier lifetimes

Analysis of carrier excitation dynamics in semiconductor heterojunctions

Advanced pumping/detection spectroscopy

Equipment characteristics

SEM-CL cathode fluorescence analysis system capable of quantitative measurement

300 μ Field of view with a diameter of m

• Spatial resolution better than 10 nm

A time resolution of 10 ps

Schottky field emission gun (continuous system) and picosecond pulse photoelectric gun (time resolved mode)

Sample temperature range: 20K-300K, displacement accuracy of 1 nm

Optical microscopy imaging

Cathode fluorescence mapping (multicolor, monochromatic, and hyperspectral)

Secondary electronic surveying and mapping

• Time resolved cathode fluorescence (time resolved option)

Secondary electron and cathode fluorescence synchronous mapping

High performance optical and SEM systems:

Easy to use, large field of view, high resolution

The Attolight SEM-CL system comes with a scanning electron microscope (10nm spatial resolution) integrated with a light mirror. The light mirror is embedded in the electronic objective of the scanning electron microscope, matching the fields of view of the two. Obtaining cathode fluorescence images has never been so simple: there is no need to adjust the optical path, and the presence of a mirror helps to complete sample localization. The system has been optimized to achieve superior cathode fluorescence performance without sacrificing the performance of scanning electron microscopy. It provides an excellent optical aperture (f/0.5) and a constant high photon collection efficiency throughout the entire field of view. At the same time, it operates within the energy range of low electron beams (3-10kV) and can obtain higher resolution cathode fluorescence images.

Schottky field emission electron gun and picosecond pulse photoelectron gun:

Continuous working mode and time resolved working mode

The type of electron gun is an important parameter that determines the performance of electron microscopy. The attolight SEM-CL adopts a specially designed Schottky field emission electron gun, providing a high brightness and high coherence electron beam, and generating fluorescence with a spatial resolution better than 10nm on the sample.

The Attolight SEM-CL system is a cathode fluorescence analysis system with a time resolution option, which can achieve a time resolution of 10ps. A time-resolved cathode fluorescence analysis system will be a tool for studying the carrier dynamics and lifetime of optoelectronic materials.

Quantitative measurement of cathode fluorescence luminescence

The Attolight SEM-CL system is capable of quantitatively measuring the cathodic fluorescence luminescence of different samples. Benefiting from its unique design, it has the ability to distinguish and detect ultra trace impurities, as well as certain crystal defects that are not visible in other imaging modes, providing new possibilities for the research and development of semiconductor materials, phosphors, ceramics, rocks, and glass