Nanofilm Thermal Conductivity Testing System TCN-2 ω
The evaluation of thermal conductivity of thin film materials has become extremely convenient
The launched nano film thermal conductivity testing system uses 2 ω A commercial system for measuring the thickness direction thermal conductivity of nano thin films. Compared with other methods, sample preparation and measurement are extremely simple.
Features:
1. Measuring the thermal conductivity of thin films at the nanoscale
Develop a method to monitor the surface temperature changes of metal films caused by thermal reflection during the heating cycle. Thus, the temperature change on the surface of the sample can be calculated using a one-dimensional thermal conductivity model in the thickness direction, making it extremely convenient to measure the thermal conductivity in the thickness direction. (Japan: 5426115)
2. Simple sample preparation
Metal thin films (1.7mm x 15mm x 100nm) can be deposited on thin film samples without the need for photolithography technology.
Application direction
1. Priority selection for evaluating the thermal conductivity of thin films used in thermal design.
Low k thin film, organic thin film, thermoelectric material thin film
2. Can be used to evaluate thermoelectric conversion thin films
measuring principle
When heating a metal film with a current cycle of frequency f, the frequency of the heat flux will be twice the frequency of the current (2f). If the sample is composed of a metal film (0) - sample film (1) - substrate (s) (as shown in the figure), the temperature change T (0) on the surface of the metal film can be calculated using a one-dimensional thermal conductivity model.
Assuming that all heat is conducted to the substrate, T (0) can be calculated by the following equation:
（ λ/ Wm-1K-1, C/JK-1m-3, q/Wm-3, d/m, ω (=2 π f)/s-1)
The real part (in-phase amplitude) in the formula contains information about the sample film. If all the heat is conducted to the substrate, the in-phase amplitude is proportional to (2) ω) 0.5, thermal conductivity of thin film（ λ 1) It can be given by the following equation:
(m: slope, n: intercept)
Equipment parameters
1. Test temperature: Room temperature
2. Sample size: 10-20mm in length and 10mm in width
0.3-1mm thick (including substrate)
3. Matrix material: Si (recommended)
Ge, Al2O3 (high thermal conductivity)
4. Sample preparation: A metal film (100nm) needs to be deposited on the sample film
(Recommended: Gold)
5. Measurement range of thin film thermal conductivity: 0.1~10W/mK
6. Test atmosphere: atmospheric
